In this research work, the effects on the structural and optical properties of e-beam irradiated Al nanoparticles (Al-NPs) by three field sizes, 4.16 x 10(16) cm(-2), 1.20 x 10(17) cm(-2) and 1.03 x 10(18) cm(-2) fluence were studied. As a result of systematic observations, it has been possible to study the effect of electron beam on X-ray diffraction (XRD), infrared (IR) spectroscopy and Raman band modifications and, consequently, on the crystal structure and atomic dynamics of Al-NPs. The XRD method determined that Al-NPs are combined with water molecules in the air to form aluminum hydroxide (Al(OH)(3)) groups. The Al(OH)(3) formation was not observed in any of the samples irradiated with three different fluences, 4.16 x 10(16) cm(-2), 1.20 x 10(17 )cm(-2) and 1.03 x 10(18) cm(-2), respectively. Confirmation of these results was also shown in the method of IR spectroscopy. While 12 vibrational modes were observed in the non-irradiated samples, only the vibrational modes corresponding to Al-Al bonds were observed in 4.16 x 10(16) cm(-2), 1.20 x 10(17 )cm(-2), and 1.03 x 10(18 )cm(-2) fluence irradiated samples. It was determined by the Raman spectroscopy method that a low concentration of Al(OH)(3) remains in the samples irradiated with 4.16 x 10(16) cm(-2) fluence. Only 1.20 x 10(17) cm(-2) and 1.03 x 10(18) cm(-2) fluence irradiated samples were found to correspond to the XRD and IR spectra, and Raman vibrational modes corresponding to Al-Al bonds were observed. In addition, electron irradiation is a suitable technique to increase the optical properties of nanoparticles by controlling the size of the particles.