ELECTRICAL PROPERTIES OF a Si H AND a SiN H FILMSPREPARED BY GLOW DISCHARGE
in: Proceedings of the Tenth ISCMP, Thin Film Materials andDevices-Developments in Science and Technology, J M Marshall, Nikolav Kirov, Alexander Vavrek,J M Maud, Editor, World Scientific Publishing Company, pp.337-340, 1999
- Publication Type: Book Chapter / Chapter Vocational Book
- Publication Date: 1999
- Publisher: World Scientific Publishing Company
- Page Numbers: pp.337-340
- Editors: J M Marshall, Nikolav Kirov, Alexander Vavrek,J M Maud, Editor
- Hacettepe University Affiliated: Yes