ELECTRICAL PROPERTIES OF a Si H AND a SiN H FILMSPREPARED BY GLOW DISCHARGE

Copy For Citation

AY İ., TOLUNAY H.

in: Proceedings of the Tenth ISCMP, Thin Film Materials andDevices-Developments in Science and Technology, J M Marshall, Nikolav Kirov, Alexander Vavrek,J M Maud, Editor, World Scientific Publishing Company, pp.337-340, 1999

• Publication Type: Book Chapter / Chapter Vocational Book
• Publication Date: 1999
• Publisher: World Scientific Publishing Company
• Page Numbers: pp.337-340
• Editors: J M Marshall, Nikolav Kirov, Alexander Vavrek,J M Maud, Editor
• Hacettepe University Affiliated: Yes