Atomic Layer Deposition Using Self-Terminated Electrodeposition Reactions

Moffat T., Liu Y., Ahn S., NL R., Wang R., Gilette E., ...More

233rd The Electrochemical Society Meeting, Seattle, United States Of America, 13 - 17 May 2018

  • Publication Type: Conference Paper / Summary Text
  • City: Seattle
  • Country: United States Of America
  • Hacettepe University Affiliated: Yes