Development of magnetically driven contactless piezoelectric nanogenerators utilizing ZnO nanowires with different shaped top electrodes


Ucar E. F., Ilbay A., Simsek T., Kaynar M. B., Ozbay E., Ozcan S.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, cilt.40, sa.1, 2025 (SCI-Expanded, Scopus) identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 40 Sayı: 1
  • Basım Tarihi: 2025
  • Doi Numarası: 10.1088/1361-6641/ad95b4
  • Dergi Adı: SEMICONDUCTOR SCIENCE AND TECHNOLOGY
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Chemical Abstracts Core, Chimica, Compendex, INSPEC
  • Hacettepe Üniversitesi Adresli: Evet

Özet

In this research, ZnO nanorod (NR)-based contactless piezoelectric nanogenerators (C-PENGs) with pyramidal and zigzag-shaped top electrodes were fabricated. ZnO NRs with different aspect ratios were grown on a Si (100) wafer, which acts as the bottom electrode. Two different top electrode architectures, zigzag-trenched and pyramidal cavity, were used. Additionally, different work function metallic coatings, platinum and nickel (as a cheaper alternative to noble metals) were applied to the architecturally shaped surfaces to achieve a Schottky contact between the top and bottom electrodes. A magnetic field ranging from 3.5 Oe to 55 Oe with a frequency range between 0.5 and 2 Hz was applied to drive the nanogenerator. The results showed that a maximum output voltage of 75 mV and a maximum power density of 20.7 pW cm-2 were successfully generated. The measurement of output power densities revealed that C-PENGs are a promising candidate for future nanorobotics applications.