Preparation and Optimization of High Quality TiN Films


DUYAR COŞKUN Ö. , KOÇUM İ. C. , DURUSOY H. Z.

Turkish Journal of Physics, vol.27, pp.519-527, 2003 (Journal Indexed in ESCI)

  • Publication Type: Article / Article
  • Volume: 27
  • Publication Date: 2003
  • Title of Journal : Turkish Journal of Physics
  • Page Numbers: pp.519-527