This study aims to form a functional film on the glass substrates by plasma polymerization of glycidoxypropyltrimethoxysilane (gamma-GPS). Low frequency plasma generator was used to prepare plasma polymer thin films of gamma-GPS (PlzP-gamma-GPS) on glass substrates at different plasma powers (30, 60 and 90W) and exposure times (5, 15 and 30 min). XPS analyses were utilized to reveal the presence of functional groups in plasma polymer films. When higher plasma powers are applied, relative amount of Si-C bonds decreases and the amount of Si-O bonds increases. Contact angle measurements were performed to evaluate surface characteristics. Atomic force microscopy (AFM) studies were carried out to elucidate morphological changes. From AFM observations, it was obtained that the surface roughness slightly increased with the increase of plasma power from 30 to 90 W. (C) 2009 Elsevier B.V. All rights reserved.