FUNCTIONAL MATERIALS, vol.26, no.2, pp.310-318, 2019 (ESCI)
The effect of nitrogen pressure during the deposition of vacuum-arc (TiZrNbVHf)N and (TiZrNbVHfTa)N coatings on their phase-structural state, substructure and resistance to abrasive wear was investigated. It was established that in multi-element (based on high-entropy alloys) (TiZrNbVHf)N and (TiZrNbVHfTa)N coatings obtained in a nitrogen atmosphere in the range of nitrogen pressures P-N = 2.5.10(-4)-4.5.10(-3) Tarr, a single-phase state is formed (based on cubic crystal lattice of structural type NaCI). The use of a multi-element composition with a single-phase state with a cubic lattice allows for (Ti-V-Zr-Nb-Hf-Ta)N coatings to achieve high microstrain values (up to 1.2 %) at low deposition pressure. It was found that high-entropy nitride coatings with low abrasive wear are characterized by a crystallite grain size of less than 50 nm, the absence or low level of texture perfection , and the presence of a rather high microstrain in crystallites (reaching 1.2 %). The reasons for the observed changes in the structural state and substructure of multi-element nitride coatings and their effect on abrasive resistance are discussed.