Growth of Si:H thin films by hot filament CVD: mu-Crystalline to amorphous transition


Polini R., Barbarossa V., Minarini C., Eray A. , Marucci A., Mattei G.

ADVANCES IN CRYSTAL GROWTH, vol.203, pp.167-172, 1996 (Journal Indexed in SCI) identifier

  • Publication Type: Article / Article
  • Volume: 203
  • Publication Date: 1996
  • Doi Number: 10.4028/www.scientific.net/msf.203.167
  • Title of Journal : ADVANCES IN CRYSTAL GROWTH
  • Page Numbers: pp.167-172