RÜZGAR, K. And BACIOĞLU, A. 2019. Process optimization of parameterized single shot method for a rapid production of photon sireve with direct write lithography. MICROELECTRONIC ENGINEERING , vol.209 , 41-48.

RÜZGAR, K., & BACIOĞLU, A., (2019). Process optimization of parameterized single shot method for a rapid production of photon sireve with direct write lithography. MICROELECTRONIC ENGINEERING , vol.209, 41-48.

RÜZGAR, Kemal, And AKIN BACIOĞLU. "Process optimization of parameterized single shot method for a rapid production of photon sireve with direct write lithography," MICROELECTRONIC ENGINEERING , vol.209, 41-48, 2019

RÜZGAR, Kemal And BACIOĞLU, AKIN. "Process optimization of parameterized single shot method for a rapid production of photon sireve with direct write lithography." MICROELECTRONIC ENGINEERING , vol.209, pp.41-48, 2019

RÜZGAR, K. And BACIOĞLU, A. (2019) . "Process optimization of parameterized single shot method for a rapid production of photon sireve with direct write lithography." MICROELECTRONIC ENGINEERING , vol.209, pp.41-48.

@article{article, author={Kemal RÜZGAR And author={AKIN BACIOĞLU}, title={Process optimization of parameterized single shot method for a rapid production of photon sireve with direct write lithography}, journal={MICROELECTRONIC ENGINEERING}, year=2019, pages={41-48} }